Hot-DI Water dry method is one of the method to dry photo mask or glass. This method is using Hot DI Water and surface tension. Work piece is traveled away from the pot which filled with Hot DI Water.
| Features | |
|---|---|
| 1 | Simple utility, only water & electrical power. |
| 2 | No IPA, No large volume CDA. |
| 3 | Final rinse effect is expected. |
| 4 | Simple mechanism, easy maintenance. |